


Mitutoyo 559-524-37 | NC-Linear Scale AT1347-100-H_1nm | Mitsubishi Interface Full Duplex | Resolution 1 ¼m
The Mitutoyo 559-524-37 (AT1347-100-H_1nm) is an ultra-precision NC-linear scale designed for cutting-edge CNC machinery and high-accuracy metrology systems. It features an exceptional 1 nm resolution, enabling nanometer-level position detection and control. The scale utilizes a Mitsubishi full-duplex interface, providing fast and reliable bi-directional communication with Mitsubishi CNC systems. Engineered for robustness, it withstands challenging industrial environments with resistance to oil, dust, and vibration. This model is ideally suited for advanced applications in semiconductor processing, ultra-precision machining, and nanotechnology-based inspection equipment.

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- Specifications
- Features
- Downloads
Current consumption [mA] | 270 mA (maximum value) |
Interface | Mitsubishi Interface Full Duplex |
Length | Signal Cable: Maximum 29 m (signal cable + feedback cable) |
Max. Response Speed | 180 m/min |
Power Supply | 5 VDC +/- 10% |
Resolution | 1 1/4m |
Series | ABS AT1300-H Series |
Type | H-Type |
- 1 nm (0.001 μm) resolution: Delivers ultra-high precision for nanometer-level positioning and measurement.
- Ensures high repeatability and extremely low interpolation error for precision-critical tasks.
- Real-time bi-directional communication via Mitsubishi full-duplex interface.
- Fully optimized for integration with Mitsubishi CNC controllers and servo systems.
- Rigid mechanical structure provides excellent resistance to thermal expansion, vibration, and mechanical stress.
- Sealed design protects internal components from coolant, oil, dust, and machining debris.
- Compatible with advanced digital feedback systems for motion control and automation.
- Designed for seamless use in nanotech machining, semiconductor tools, and ultra-precision CMMs.
- Ideal for ultra-fine CNC systems, inspection platforms, and microfabrication processes.
- Widely used in aerospace, medical device manufacturing, and semiconductor industries where nanometer accuracy is essential.
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