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Alicat Scientific MS | Corrosion-Resistant Mass Flow Meter | 0.5 SCCM-12,000 SLPM, 130 gases
Part Number : MS
The Alicat Scientific MS uses corrosion-resistant wetted materials to measure corrosive and non-corrosive gases across 0.5 SCCM to 12,000 SLPM full scale, at 11.5 to 160 PSIA. It is specified at ±0.4% of reading and ±0.2% of full scale, with 130 gas calibrations including corrosives. It suits chemical, semiconductor and research work with reactive gases. For integration, the MS offers process connections of 10-32, NPT, SAE, BSPP, VCRM, VCO, compression.
Key features
- 130 preloaded gases incl. corrosives
- Corrosion-resistant wetted path
- 10,000:1 turndown
- Laminar DP measurement with temperature and pressure correction
- Range codes MS-0.5SCCM to MS-10000SLPM listed
- Process connections: 10-32, NPT, SAE, BSPP, VCRM, VCO, compression
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