Skip to product information
Availability:
in stock
Alicat Scientific SFF | SEMI Form Factor Mass Flow Controller | 0.5 SCCM-20 SLPM, SEMI footprint
Part Number : SFF
Built to the SEMI standard footprint, the Alicat Scientific SFF controls 0.5 SCCM to 20 SLPM full scale and replaces the earlier MCE series. Accuracy is ±0.5% of reading or ±0.1% of full scale and the operating temperature range is -10 to +60 °C. Machined fittings reduce the number of sealing surfaces for semiconductor and thin-film tools. On the SFF, process connections cover VCR (default), compression, VCO.
Key features
- SEMI standard footprint
- Machined fittings with fewer seals
- 10,000:1 control range
- 98 selectable gas calibrations
- Replaces MCE series
- Process connections: VCR (default), compression, VCO
For pricing, please contact our experts.
