


Mitutoyo 559-502-37 | NC Linear Scale AT1347-200-S | S-Type | Mitsubishi MDS Interface | Resolution 0.001 ¼m
The Mitutoyo 559-502-37 NC Linear Scale (AT1347-200-S) offers exceptional 0.001 μm (1 nm) resolution, making it one of the most precise encoders in its class. Its S-Type structure ensures mechanical stability and thermal resilience, even under demanding industrial conditions. With a 200 mm measuring range, it supports medium-travel applications requiring ultra-fine motion control. Designed for seamless compatibility with Mitsubishi MDS interfaces, it enables high-speed, nanometer-level feedback. Perfect for high-precision machining, optical manufacturing, and semiconductor processing environments.

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- Specifications
- Features
- Downloads
Current consumption [mA] | 270 mA (maximum value) |
Interface | Mitsubishi MDS |
Length | Signal Cable: Maximum 29 m (signal cable + feedback cable) |
Power Supply | 5 VDC +/- 10% |
Resolution | 0.001 1/4m |
Series | ABS AT1300-S Series |
Type | S-Type |
- Ultra-High Resolution: 0.001 μm (1 nm) for nanometer-scale feedback
- Measuring Range: 200 mm, ideal for precision-critical linear motion
- Interface: Mitsubishi MDS for fast, stable CNC communication
- S-Type Construction: Ensures structural integrity and vibration resistance
- Ideal Applications: Semiconductor tools, ultra-precision machining, optical metrology
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