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Mitutoyo 378-185-3 | FS70ZTH Microscope Unit for Semiconductor Inspection | 50 mm focus travel
Item 378-185-3 is the FS70ZTH microscope unit from the FS70 series, built for semiconductor inspection with 50 mm focus travel and a C-mount for cameras (optional adapter B). Its tilting head (TH versions) adjusts from 0° to 20°.
Key features
- Short-base model designation: FS70Z-THS
- Focus: concentric coarse and fine wheels; 0.1 mm/rev. fine and 3.8 mm/rev. coarse
- Reflected bright-field illumination (Koehler, with aperture diaphragm); optional 12 V / 100 W fibre-optic light source, 1.5 m light guide
- Siedentopf-type eyepiece tube, interpupillary distance 51-76 mm
- Tilting head: 0° - 20° (TH and THS models)
- Bright field, DIC and polarized observation are standard on the FS70Z models
- Specifications
- Downloads
| Part Number | 378-185-3 |
| Brand | Mitutoyo |
| Model Short Base | FS70Z-THS |
| Focus Travel | 50 mm |
| Fine Focus | 0.1 mm/rev. |
| Coarse Focus | 3.8 mm/rev. |
| Light Source | Optional 12 V / 100 W fibre-optic |
| Light Guide Length | 1.5 m |
| Interpupillary Distance | 51-76 mm |
| Camera Mount | C-mount (optional adapter B) |
| Illumination | Reflected bright field, Koehler |
| Tilt Angle | 0° - 20° |
| Observation Methods | Bright field, DIC, polarized |
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