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Alicat Scientific PCX | Metal-Seal High-Purity Pressure Controller | 500 Torr-100 PSIA, <1e-10 leak
Part Number : PCX
With metal seals and an external leak rate below 1 x 10^-10 atm-cc/s helium, the Alicat Scientific PCX offers the highest corrosion resistance in the PC range. It controls absolute pressure from 500 Torr to 100 PSIA with accuracy as good as ±0.125% of full scale and response as fast as 30 ms. It is SEMI F36 compatible for semiconductor gas delivery. Each PCX unit is made to order, and Alicat applications engineers can advise on custom configurations.
Key features
- Metal-sealed flow path
- SEMI F36 compatible footprint
- 10,000:1 control range
- Absolute pressure control
- Response as fast as 30 ms
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